Granted Patent
Utility
US 5,932,022 · App. 09/064,029
SC-2 based pre-thermal treatment wafer cleaning process
Inventors:
Jack H. Linn, George V. Rouse, Sana Rafie, Roberta R. Nolan-Lobmeyer, Diana L. Hackenberg, Steven T. Slasor, Timothy Arthur Valade
Patented Case
View Patent ↗
Granted: Aug 3, 1999
Filed: Apr 21, 1998
Inventors
Jack H. Linn
George V. Rouse
Sana Rafie
Roberta R. Nolan-Lobmeyer
Diana L. Hackenberg
Steven T. Slasor
Timothy Arthur Valade
Assignee (at issue)
HARRIS CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.