Granted Patent
Utility
US 5,933,359 · App. 09/048,570
Method, apparatus and computer program product for simulating ion implantation
Inventor:
Koichi Sawahata
Patented Case
View Patent ↗
Granted: Aug 3, 1999
Filed: Mar 26, 1998
Inventor
Koichi Sawahata
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.