Granted Patent
Utility
US 5,933,730 · App. 08/813,562
Method of spacer formation and source protection after self-aligned source is formed and a device provided by such a method
Inventors:
Yu Sun, Chi Chang, Mark T. Ramsbey
Patented Case
View Patent ↗
Granted: Aug 3, 1999
Filed: Mar 7, 1997
Inventors
Yu Sun
Chi Chang
Mark T. Ramsbey
Assignee (at issue)
Advanced Micro Devices, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.