Granted Patent
Utility
US 5,933,743 · App. 08/887,612
Method of improving alignment signal strength by reducing refraction index at interface of materials in semiconductors
Inventors:
Daryl C. New, Thomas M. Graettinger
Patented Case
View Patent ↗
Granted: Aug 3, 1999
Filed: Jul 3, 1997
Inventors
Daryl C. New
Thomas M. Graettinger
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.