Granted Patent
Utility
US 5,935,397 · App. 09/070,314
Physical vapor deposition chamber
Inventor:
Sean P. Masterson
Patented Case
View Patent ↗
Granted: Aug 10, 1999
Filed: Apr 30, 1998
Inventor
Sean P. Masterson
Assignee (at issue)
Rockwell Semiconductor Systems, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.