Granted Patent
Utility
US 5,935,764 · App. 08/997,465
Method of forming alignment mark and fabricating semiconductor device
Inventor:
Eiichiro Kakehashi
Patented Case
View Patent ↗
Granted: Aug 10, 1999
Filed: Dec 23, 1997
Inventor
Eiichiro Kakehashi
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.