IP Library › Granted Patent US 5,938,513
Granted Patent Utility
US 5,938,513 · App. 08/868,491

Apparatus for handling polishing carriers

Inventors: Michael Slepikas, John Anderson
Patented Case View Patent ↗
Granted: Aug 17, 1999 Filed: Jun 3, 1997
Inventors
Michael Slepikas
John Anderson
Assignee (at issue)
SpeedFam-IPEC Corporation

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Quick Facts
Patent No.
US 5,938,513
App. No.
08/868,491
Filed
1997-06-03
Granted
1999-08-17
Kind
A