Granted Patent
Utility
US 5,940,175 · App. 08/742,448
Method and apparatus for surface inspection in a chamber
Inventor:
James J. Sun
Patented Case
View Patent ↗
Granted: Aug 17, 1999
Filed: Nov 1, 1996
Inventor
James J. Sun
Assignee (at issue)
MSP CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.