Granted Patent
Utility
US 5,940,418 · App. 08/755,166
Solid-state laser system for ultra-violet micro-lithography
Inventor:
Henry Shields
Patented Case
View Patent ↗
Granted: Aug 17, 1999
Filed: Nov 22, 1996
Inventor
Henry Shields
Assignee (at issue)
JMAR Technology Co.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.