Granted Patent
Utility
US 5,940,421 · App. 08/990,848
Current reversal prevention circuit for a pulsed gas discharge laser
Inventors:
William N. Partlo, Daniel L. Birx, Richard M. Ness
Patented Case
View Patent ↗
Granted: Aug 17, 1999
Filed: Dec 15, 1997
Inventors
William N. Partlo
Daniel L. Birx
Richard M. Ness
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.