Granted Patent
Utility
US 5,942,355 · App. 08/706,474
Method of fabricating a phase-shifting semiconductor photomask
Inventors:
Steve Brainerd, J. Brett Rolfson
Patented Case
View Patent ↗
Granted: Aug 24, 1999
Filed: Sep 4, 1996
Inventors
Steve Brainerd
J. Brett Rolfson
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.