Granted Patent
Utility
US 5,945,672 · App. 09/015,362
Gaseous backscattered electron detector for an environmental scanning electron microscope
Inventors:
W. Ralph Knowles, Thomas A. Hardt, Peter D. Smith
Patented Case
View Patent ↗
Granted: Aug 31, 1999
Filed: Jan 29, 1998
Inventors
W. Ralph Knowles
Thomas A. Hardt
Peter D. Smith
Assignee (at issue)
FEI Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.