Granted Patent
Utility
US 5,947,802 · App. 08/965,037
Wafer shuttle system
Inventors:
John Zhang, H. Alexander Anderson
Patented Case
View Patent ↗
Granted: Sep 7, 1999
Filed: Nov 5, 1997
Inventors
John Zhang
H. Alexander Anderson
Assignee (at issue)
Aplex, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.