Granted Patent
Utility
US 5,948,699 · App. 08/975,752
Wafer backing insert for free mount semiconductor polishing apparatus and process
Inventors:
Edwin Lawrence, Iqbal K. Bansal
Patented Case
View Patent ↗
Granted: Sep 7, 1999
Filed: Nov 21, 1997
Inventors
Edwin Lawrence
Iqbal K. Bansal
Assignee (at issue)
SiBond, L.L.C.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.