Granted Patent
Utility
US 5,949,079 · App. 09/253,075
Method of and an apparatus for electron beam exposure
Inventor:
Naka Onoda
Patented Case
View Patent ↗
Granted: Sep 7, 1999
Filed: Feb 19, 1999
Inventor
Naka Onoda
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.