Granted Patent
Utility
US 5,949,900 · App. 08/814,342
Fine pattern inspection device capable of carrying out inspection without pattern recognition
Inventors:
Toyokazu Nakamura, Yoshikazu Komatsu
Patented Case
View Patent ↗
Granted: Sep 7, 1999
Filed: Mar 11, 1997
Inventors
Toyokazu Nakamura
Yoshikazu Komatsu
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.