IP Library › Granted Patent US 5,950,327
Granted Patent Utility
US 5,950,327 · App. 08/676,546

Methods and apparatus for cleaning and drying wafers

Inventors: Glenn E. Peterson, Eric Shurtliff
Patented Case View Patent ↗
Granted: Sep 14, 1999 Filed: Jul 8, 1996
Inventors
Glenn E. Peterson
Eric Shurtliff
Assignee (at issue)
SpeedFam-IPEC Corporation

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Quick Facts
Patent No.
US 5,950,327
App. No.
08/676,546
Filed
1996-07-08
Granted
1999-09-14
Kind
A