Granted Patent
Utility
US 5,950,330 · App. 09/061,062
Vacuum processing apparatus and operating method therefor
Inventors:
Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou
Patented Case
View Patent ↗
Granted: Sep 14, 1999
Filed: Apr 16, 1998
Inventors
Shigekazu Kato
Kouji Nishihata
Tsunehiko Tsubone
Atsushi Itou
Assignee (at issue)
HITACHI, LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.