Granted Patent
Utility
US 5,951,370 · App. 08/944,937
Method and apparatus for monitoring and controlling the flatness of a polishing pad
Inventor:
Joseph V. Cesna
Patented Case
View Patent ↗
Granted: Sep 14, 1999
Filed: Oct 2, 1997
Inventor
Joseph V. Cesna
Assignee (at issue)
SpeedFam-IPEC Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.