Granted Patent
Utility
US 5,951,774 · App. 08/967,058
Cold-wall operated vapor-phase growth system
Inventors:
Seiichi Shishiguchi, Tohru Aoyama, Tatsuya Suzuki
Patented Case
View Patent ↗
Granted: Sep 14, 1999
Filed: Nov 10, 1997
Inventors
Seiichi Shishiguchi
Tohru Aoyama
Tatsuya Suzuki
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.