Granted Patent
Utility
US 5,952,086 · App. 08/737,313
Titanium target for sputtering and method of manufacturing same
Inventors:
Takashi Ohnishi, Yasunori Yoshimura, Setsuo Okamoto
Patented Case
View Patent ↗
Granted: Sep 14, 1999
Filed: Nov 12, 1996
Inventors
Takashi Ohnishi
Yasunori Yoshimura
Setsuo Okamoto
Assignee (at issue)
Sumitomo Sitix of Amagasaki, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.