Granted Patent
Utility
US 5,954,873 · App. 08/990,187
Manufacturing method for a silicon single crystal wafer
Inventors:
Masataka Hourai, Eiji Kajita
Patented Case
View Patent ↗
Granted: Sep 21, 1999
Filed: Dec 12, 1997
Inventors
Masataka Hourai
Eiji Kajita
Assignee (at issue)
Sumitomo Sitix Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.