Granted Patent
Utility
US 5,954,878 · App. 08/876,273
Apparatus for uniformly coating a substrate
Inventors:
Robert P. Mandal, James C. Grambow, Ted C. Bettes, Donald R. Sauer, Emir Guegrer, Edmond R. Ward
Patented Case
View Patent ↗
Granted: Sep 21, 1999
Filed: Jun 16, 1997
Inventors
Robert P. Mandal
James C. Grambow
Ted C. Bettes
Donald R. Sauer
Emir Guegrer
Edmond R. Ward
Assignee (at issue)
Silicon Valley Group, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.