IP Library › Granted Patent US 5,954,888
Granted Patent Utility
US 5,954,888 · App. 09/020,979

Post-CMP wet-HF cleaning station

Inventors: Anand Gupta, Chris Karlsrud, Periya Gopalan
Patented Case View Patent ↗
Granted: Sep 21, 1999 Filed: Feb 9, 1998
Inventors
Anand Gupta
Chris Karlsrud
Periya Gopalan
Assignee (at issue)
SPEEDFAM CO., LTD.

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Quick Facts
Patent No.
US 5,954,888
App. No.
09/020,979
Filed
1998-02-09
Granted
1999-09-21
Kind
A