Granted Patent
Utility
US 5,956,565 · App. 08/748,655
Analysis apparatus and analysis methods for semiconductor devices
Inventor:
Hiroshi Yamashita
Patented Case
View Patent ↗
Granted: Sep 21, 1999
Filed: Nov 14, 1996
Inventor
Hiroshi Yamashita
Assignee (at issue)
Matsushita Electronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.