Granted Patent
Utility
US 5,956,595 · App. 08/892,999
Method of fabricating a semiconductor integrated circuit having a capacitor with lower electrode comprising titanium nitride
Inventor:
Masanobu Zenke
Patented Case
View Patent ↗
Granted: Sep 21, 1999
Filed: Jul 15, 1997
Inventor
Masanobu Zenke
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.