Granted Patent
Utility
US 5,957,763 · App. 08/932,578
Polishing apparatus with support columns supporting multiple platform members
Inventors:
Robert Luke Anderson, Michael Manseau, Janusz Aleksander Derza, John Edward Bussan
Patented Case
View Patent ↗
Granted: Sep 28, 1999
Filed: Sep 19, 1997
Inventors
Robert Luke Anderson
Michael Manseau
Janusz Aleksander Derza
John Edward Bussan
Assignee (at issue)
SPEEDFAM CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.