Granted Patent
Utility
US 5,958,148 · App. 08/895,284
Method for cleaning workpiece surfaces and monitoring probes during workpiece processing
Inventors:
Paul Holzapfel, Andrew Michael Yednak, III, John Natalicio, Chad Goudie
Patented Case
View Patent ↗
Granted: Sep 28, 1999
Filed: Jul 16, 1997
Inventors
Paul Holzapfel
Andrew Michael Yednak, III
John Natalicio
Chad Goudie
Assignee (at issue)
SpeedFam-IPEC Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.