Granted Patent
Utility
US 5,958,508 · App. 08/828,635
Process for forming a semiconductor device
Inventors:
Olubunmi O. Adetutu, Dean J. Denning, James D. Hayden, Chitra Subramanian, Arkalgud R. Sitaram
Patented Case
View Patent ↗
Granted: Sep 28, 1999
Filed: Mar 31, 1997
Inventors
Olubunmi O. Adetutu
Dean J. Denning
James D. Hayden
Chitra Subramanian
Arkalgud R. Sitaram
Assignee (at issue)
Motorola, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.