Granted Patent
Utility
US 5,958,635 · App. 08/954,160
Lithographic proximity correction through subset feature modification
Inventors:
Alfred J. Reich, Hak-Lay Chuang, Michael E. Kling, Paul G. Y. Tsui, Kevin Lucas, James N. Conner
Patented Case
View Patent ↗
Granted: Sep 28, 1999
Filed: Oct 20, 1997
Inventors
Alfred J. Reich
Hak-Lay Chuang
Michael E. Kling
Paul G. Y. Tsui
Kevin Lucas
James N. Conner
Assignee (at issue)
Motorola, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.