Granted Patent
Utility
US 5,959,516 · App. 09/004,679
Tunable-trimmable micro electro mechanical system (MEMS) capacitor
Inventors:
Mau-Chung Frank Chang, Henry O. Marcy, 5th, Kenneth D. Pedrotti, David Richard Pehlke, Charles W. Seabury, Jun Yao, Sangtae Park, J. L. Julian Tham, Deepak Mehrotra, James L. Bartlett
Patented Case
View Patent ↗
Granted: Sep 28, 1999
Filed: Jan 8, 1998
Inventors
Mau-Chung Frank Chang
Henry O. Marcy, 5th
Kenneth D. Pedrotti
David Richard Pehlke
Charles W. Seabury
Jun Yao
Sangtae Park
J. L. Julian Tham
Deepak Mehrotra
James L. Bartlett
Assignee (at issue)
Rockwell Science Center, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.