Granted Patent
Utility
US 5,960,147 · App. 08/821,533
Probe, manufacturing method therefor and scanning probe microscope
Inventors:
Hiroshi Muramatsu, Noritaka Yamamoto, Norio Chiba, Kunio Nakajima
Patented Case
View Patent ↗
Granted: Sep 28, 1999
Filed: Mar 21, 1997
Inventors
Hiroshi Muramatsu
Noritaka Yamamoto
Norio Chiba
Kunio Nakajima
Assignee (at issue)
SEIKO INSTRUMENTS INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.