Granted Patent
Utility
US 5,960,300 · App. 08/574,690
Method of manufacturing semiconductor device
Inventors:
Toshiki Yabu, Takashi Uehara, Mizuki Segawa, Takashi Nakabayashi
Patented Case
View Patent ↗
Granted: Sep 28, 1999
Filed: Dec 19, 1995
Inventors
Toshiki Yabu
Takashi Uehara
Mizuki Segawa
Takashi Nakabayashi
Assignee (at issue)
SUMITOMO ELECTRIC INDUSTRIES, LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.