Granted Patent
Utility
US 5,960,960 · App. 08/951,054
Wafer carrier
Inventor:
Nobuo Yamamoto
Patented Case
View Patent ↗
Granted: Oct 5, 1999
Filed: Oct 15, 1997
Inventor
Nobuo Yamamoto
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.