IP Library › Granted Patent US 5,961,369
Granted Patent Utility
US 5,961,369 · App. 09/090,666

Methods for the in-process detection of workpieces with a monochromatic light source

Inventors: Anthony L. Bartels, Robert F. Allen, Paul Holzapfel, Warren Lin
Patented Case View Patent ↗
Granted: Oct 5, 1999 Filed: Jun 4, 1998
Inventors
Anthony L. Bartels
Robert F. Allen
Paul Holzapfel
Warren Lin
Assignee (at issue)
SpeedFam-IPEC Corporation

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Quick Facts
Patent No.
US 5,961,369
App. No.
09/090,666
Filed
1998-06-04
Granted
1999-10-05
Kind
A