Granted Patent
Utility
US 5,961,794 · App. 08/726,466
Method of manufacturing semiconductor devices
Inventor:
Tomotake Morita
Patented Case
View Patent ↗
Granted: Oct 5, 1999
Filed: Oct 4, 1996
Inventor
Tomotake Morita
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.