Granted Patent
Utility
US 5,962,080 · App. 08/795,161
Deposition of insulating thin film by a plurality of ion beams
Inventors:
Minshen Tan, Swie-In Tan
Patented Case
View Patent ↗
Granted: Oct 5, 1999
Filed: Feb 10, 1997
Inventors
Minshen Tan
Swie-In Tan
Assignee (at issue)
Read Rite Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.