Granted Patent
Utility
US 5,962,347 · App. 09/188,371
Semiconductor integrated circuit arrangement fabrication method
Inventors:
Takafumi Tokunaga, Sadayuki Okudaira, Tatsumi Mizutani, Kazutami Tago, Hideyuki Kazumi, Ken Yoshioka
Patented Case
View Patent ↗
Granted: Oct 5, 1999
Filed: Nov 10, 1998
Inventors
Takafumi Tokunaga
Sadayuki Okudaira
Tatsumi Mizutani
Kazutami Tago
Hideyuki Kazumi
Ken Yoshioka
Assignee (at issue)
HITACHI, LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.