Granted Patent
Utility
US 5,962,791 · App. 09/116,666
Pirani+capacitive sensor
Inventors:
Urs Wälchli, Per Bjorkman
Patented Case
View Patent ↗
Granted: Oct 5, 1999
Filed: Jul 16, 1998
Inventors
Urs Wälchli
Per Bjorkman
Assignee (at issue)
Balzers Aktiengesellschaft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.