Granted Patent
Utility
US 5,963,753 · App. 09/009,100
Substrate processing apparatus
Inventors:
Masami Ohtani, Minobu Matsunaga, Tutomu Ueyama, Ryuji Kitakado, Kaoru Aoki, Masao Tsuji
Patented Case
View Patent ↗
Granted: Oct 5, 1999
Filed: Jan 20, 1998
Inventors
Masami Ohtani
Minobu Matsunaga
Tutomu Ueyama
Ryuji Kitakado
Kaoru Aoki
Masao Tsuji
Assignee (at issue)
DAINIPPON SCREEN MFG. CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.