Granted Patent
Utility
US 5,963,828 · App. 08/773,471
Method for tungsten nucleation from WF.sub.6 using titanium as a reducing agent
Inventors:
Derryl D. J. Allman, Verne Hornback, Ramanath Ganapathiraman, Leslie H. Allen
Patented Case
View Patent ↗
Granted: Oct 5, 1999
Filed: Dec 23, 1996
Inventors
Derryl D. J. Allman
Verne Hornback
Ramanath Ganapathiraman
Leslie H. Allen
Assignee (at issue)
LSI Logic Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.