Granted Patent
Utility
US 5,963,837 · App. 08/846,924
Method of planarizing the semiconductor structure
Inventors:
Matthias Ilg, Dirk Tobben, Peter Weigand
Patented Case
View Patent ↗
Granted: Oct 5, 1999
Filed: Apr 30, 1997
Inventors
Matthias Ilg
Dirk Tobben
Peter Weigand
Assignee (at issue)
Siemens Aktiengesellschaft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.