Granted Patent
Utility
US 5,965,330 · App. 08/761,308
Methods for fabricating annular mask lens having diffraction-reducing edges
Inventors:
John M. Evans, Chun-Shen Lee, Praful Doshi, Jerome A. Legerton
Patented Case
View Patent ↗
Granted: Oct 12, 1999
Filed: Dec 6, 1996
Inventors
John M. Evans
Chun-Shen Lee
Praful Doshi
Jerome A. Legerton
Assignee (at issue)
PBH, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.