IP Library Granted Patent US 5,965,894
Granted Patent Utility
US 5,965,894 · App. 08/982,880

Method of operating a particle-optical apparatus

Inventors: Marcellinus P. C. M. Krijn, Alexander Henstra
Patented Case View Patent ↗
Granted: Oct 12, 1999 Filed: Dec 2, 1997
Inventors
Marcellinus P. C. M. Krijn
Alexander Henstra
Assignee (at issue)
U.S. Philips Corporation

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Quick Facts
Patent No.
US 5,965,894
App. No.
08/982,880
Filed
1997-12-02
Granted
1999-10-12
Kind
A