IP Library Granted Patent US 5,967,489
Granted Patent Utility
US 5,967,489 · App. 08/982,583

Fluid control apparatus

Inventors: Masahiko Nakazawa, Kazuo Tsukada, Michio Yamaji, Hisashi Tanaka
Patented Case View Patent ↗
Granted: Oct 19, 1999 Filed: Dec 2, 1997
Inventors
Masahiko Nakazawa
Kazuo Tsukada
Michio Yamaji
Hisashi Tanaka
Assignees (at issue)
Aera Japan Ltd.
Fujikin Incorporated

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Quick Facts
Patent No.
US 5,967,489
App. No.
08/982,583
Filed
1997-12-02
Granted
1999-10-19
Kind
A