Granted Patent
Utility
US 5,968,263 · App. 09/053,164
Open-loop method and system for controlling growth of semiconductor crystal
Inventors:
Sunil Grover, Steven L. Kimbel
Patented Case
View Patent ↗
Granted: Oct 19, 1999
Filed: Apr 1, 1998
Inventors
Sunil Grover
Steven L. Kimbel
Assignee (at issue)
MEMC Electronic Materials, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.