Granted Patent
Utility
US 5,968,686 · App. 08/910,424
Charged-beam exposure mask and charged-beam exposure method
Inventors:
Yasuhisa Yamada, Hiroshi Nozue
Patented Case
View Patent ↗
Granted: Oct 19, 1999
Filed: Aug 13, 1997
Inventors
Yasuhisa Yamada
Hiroshi Nozue
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.