Granted Patent
Utility
US 5,969,355 · App. 08/923,562
Focused ion beam optical axis adjustment method and focused ion beam apparatus
Inventors:
Toshiaki Fujii, Toshio Doi, Munenori Tasai, Yasuhiko Sugiyama
Patented Case
View Patent ↗
Granted: Oct 19, 1999
Filed: Sep 4, 1997
Inventors
Toshiaki Fujii
Toshio Doi
Munenori Tasai
Yasuhiko Sugiyama
Assignee (at issue)
SEIKO INSTRUMENTS INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.