Granted Patent
Utility
US 5,970,082 · App. 08/886,715
Very narrow band laser
Inventor:
Alexander I. Ershov
Patented Case
View Patent ↗
Granted: Oct 19, 1999
Filed: Jul 1, 1997
Inventor
Alexander I. Ershov
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.