Granted Patent
Utility
US 5,970,334 · App. 08/938,709
Method of manufacturing contacts to diverse doped regions using intermediate layer of arsenic or phosphorus
Inventor:
Hiroshi Tsuda
Patented Case
View Patent ↗
Granted: Oct 19, 1999
Filed: Sep 26, 1997
Inventor
Hiroshi Tsuda
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.